JPS6219969Y2 - - Google Patents
Info
- Publication number
- JPS6219969Y2 JPS6219969Y2 JP2443877U JP2443877U JPS6219969Y2 JP S6219969 Y2 JPS6219969 Y2 JP S6219969Y2 JP 2443877 U JP2443877 U JP 2443877U JP 2443877 U JP2443877 U JP 2443877U JP S6219969 Y2 JPS6219969 Y2 JP S6219969Y2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- housing
- ray source
- vacuum
- analysis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000011888 foil Substances 0.000 claims description 8
- 238000004458 analytical method Methods 0.000 description 13
- 150000002500 ions Chemical class 0.000 description 7
- 238000005530 etching Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000000992 sputter etching Methods 0.000 description 2
- 238000012916 structural analysis Methods 0.000 description 2
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 1
- 239000012776 electronic material Substances 0.000 description 1
- 238000000921 elemental analysis Methods 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2443877U JPS6219969Y2 (en]) | 1977-02-28 | 1977-02-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2443877U JPS6219969Y2 (en]) | 1977-02-28 | 1977-02-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS53119986U JPS53119986U (en]) | 1978-09-25 |
| JPS6219969Y2 true JPS6219969Y2 (en]) | 1987-05-21 |
Family
ID=28862915
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2443877U Expired JPS6219969Y2 (en]) | 1977-02-28 | 1977-02-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6219969Y2 (en]) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60156445U (ja) * | 1984-03-27 | 1985-10-18 | 株式会社島津製作所 | Ｘ線光電子分光装置用の排気装置 |
| JP2542569B2 (ja) * | 1985-05-17 | 1996-10-09 | 株式会社島津製作所 | Ｘ線光電子分光装置 |
| JPH04303Y2 (en]) * | 1989-12-07 | 1992-01-07 |
-
1977
- 1977-02-28 JP JP2443877U patent/JPS6219969Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS53119986U (en]) | 1978-09-25 |
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